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Silicon Pressure Sensor
Description of Silicon Pressure Sensor
Based on silicon piezoresistive technology, UPX6-a, -b, and -c are manufactured by adopting high quality piezoresistive silicon chips.
UPX6-a silicon piezoresistive pressure sensor is the ultra-thin design based on UPX19 foundation.
UPX6-b silicon piezoresistive pressure sensor is manufactured by using UPX-19's manufacturing techniques. It is designed for application of high pressure situation. Its small diameter causes the strength on the sensor body reduce greatly after installation.
UPX6-c silicon piezoresistive pressure sensor is manufactured by using UPX-19's manufacturing techniques. Except their outer diameters and lengths, other technical specifications of these sensors are completely same.
Features of Silicon Pressure Sensor
◇Computer tested, high precise compensation
◇Good performance, high reliability
◇Imported pressure silicon dies
◇Isolated-type structure, suitable for many kinds of media measurement
Specifications of Silicon Pressure Sensor
| pressure medium | gas or liquid compatible to stainless steel |
|
pressure ranges |
-1...0~0.2...100 bar (UPX6-a G, A, S) 0~10...1000 bar (UPX6-b A, S) -1...0~0.4...400bar (UPX6-c G A S) |
| pressure type | gauge(G), absolute(A), sealed gauge(S) |
| overload pressure | 150%FS |
| output signal | ≥70mV(typical) |
| accuracy | 0.25%FS(standard), 0.5%FS |
| zero offset | ≤±2mV |
| long-term stability | <0.2%FS/year |
| excitation | 1.5mA or 10V DC (1.5mA standard) |
| compensated temperature range | -10~+70℃ |
| operating temperature range | -40~+100℃ |
| storage temperature range | -40~+100℃ |
| temperature coefficient of zero | 0.2%FS/10℃ |
| temperature coefficient of span | 0.2%FS/10℃ |
| input/output resistance | 2~6kΩ |
| insulation resistance | 100MΩ@50VDC |
| electrical connection | 6 pin or 4wires |
| material of pressure membrane and housing | 316L |
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